<p>本文是对MEMS相关术语的简要说明。</p>
<p><img alt="MEMS术语" data-entity-type="file" data-entity-uuid="d4e83d65-60bc-4e7c-b1bb-836b00b1683f" src="/sites/default/files/inline-images/%E6%9C%AF%E8%AF%AD.PNG" /></p>
<p>文章来源：<a href="https://www.rohm.com.cn/electronics-basics/piezo/what4">罗姆</a></p>